{"id":55,"date":"2025-12-24T15:28:22","date_gmt":"2025-12-24T07:28:22","guid":{"rendered":"http:\/\/8.217.15.65\/?p=55"},"modified":"2026-01-14T17:06:35","modified_gmt":"2026-01-14T09:06:35","slug":"semiconductor-equipment-ceramic-robot-arm","status":"publish","type":"post","link":"https:\/\/www.xycmat.com\/ko\/successful-case\/semiconductor-industry\/semiconductor-equipment-ceramic-robot-arm\/","title":{"rendered":"\uc6e8\uc774\ud37c \ucde8\uae09 \uc190\uac00\ub77d"},"content":{"rendered":"

<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

\uc81c\ud488 \ud2b9\uc9d5 - \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc6a9 \uc138\ub77c\ubbf9 \ub85c\ubd07 \ud314<\/strong><\/h1>\n\n\n\n

\uc6e8\uc774\ud37c \ucde8\uae09 \uc190\uac00\ub77d<\/strong><\/h2>\n\n\n\n

\uc138\ub77c\ubbf9 \ub85c\ubd07 \ud551\uac70, \uc6e8\uc774\ud37c \uce90\ub9ac\uc5b4 \ub610\ub294 \uc138\ub77c\ubbf9 \ud578\ub4e4\ub9c1 \uc554\uc774\ub77c\uace0\ub3c4 \ud558\ub294 \uc138\ub77c\ubbf9 \uae30\uacc4\uc2dd \uc554\uc740 \uc8fc\ub85c \ubc18\ub3c4\uccb4 \uc7a5\ube44\uc5d0\uc11c \uc6e8\uc774\ud37c\ub97c \uc6b4\ubc18\ud558\uace0 \uc774\uc1a1\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \ubc18\ub3c4\uccb4 \uc7a5\ube44 \ub85c\ubd07\uc758 '\uc190' \uc5ed\ud560\uc744 \ud558\uba70 \uc6d0\ud615\uc758 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc815\ub41c \uc704\uce58\ub85c \uc815\ubc00\ud558\uac8c \uc774\ub3d9\ud558\ub294 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

\uc81c\ud488 \ud2b9\uc9d5<\/strong><\/p>\n\n\n\n

    \n
  1. \ub192\uc740 \uc81c\ud488 \uc815\ubc00\ub3c4<\/li>\n\n\n\n
  2. \ub6f0\uc5b4\ub09c \uae30\ubc00\uc131<\/li>\n\n\n\n
  3. \uc6b0\uc218\ud55c \uace0\uc628 \ub0b4\uc131<\/li>\n\n\n\n
  4. \uc81c\uc5b4 \uac00\ub2a5\ud55c \ud45c\uba74 \uc800\ud56d\ub960<\/li>\n\n\n\n
  5. \uc0b0, \uc54c\uce7c\ub9ac, \ubd80\uc2dd\uc5d0 \ub300\ud55c \uac15\ud55c \ub0b4\uc131\uc73c\ub85c \uadf9\ud55c\uc758 \ud658\uacbd\uc5d0\ub3c4 \uc801\ud569\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n\n\n\n

    \uc790\uccb4 \ubc00\ubd09 \ud14c\uc2a4\ud2b8: \uc9c4\uacf5 \uacf5\uae30 \uacf5\uae09\uc6d0\uc744 \ub044\uace0 -85kPa ~ -80kPa\uc758 \uc74c\uc555\uc744 60\ucd08 \uc774\uc0c1 \uc720\uc9c0\ud569\ub2c8\ub2e4.
    \uc6e8\uc774\ud37c \ud761\ucc29 \ud14c\uc2a4\ud2b8: \uc9c4\uacf5 \uacf5\uae30 \uacf5\uae09\uc6d0\uc744 \ub044\uace0 -80kPa ~ -25kPa\uc758 \uc74c\uc555\uc744 35\ucd08 \uc774\uc0c1 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

    <\/p>\n\n\n\n

      \n
    • \ub192\uc740 \ucc28\uc6d0 \uc815\ubc00\ub3c4<\/strong>: \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815\uc5d0 \ud544\uc218\uc801\uc778 \uc815\ud655\ud55c \uc6e8\uc774\ud37c \ucde8\uae09 \ubc0f \uc704\uce58 \uc9c0\uc815\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
    • \ud0c1\uc6d4\ud55c \uae30\ubc00\uc131<\/strong>: \uc6e8\uc774\ud37c \uc774\uc1a1 \uc911 \uc548\uc815\uc801\uc778 \uc9c4\uacf5 \uc0c1\ud0dc\ub97c \uc720\uc9c0\ud558\uc5ec \uc624\uc5fc \uc704\ud5d8\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
    • \ub6f0\uc5b4\ub09c \uace0\uc628 \ub0b4\uad6c\uc131<\/strong>: \ubcc0\ud615\uc774\ub098 \uc131\ub2a5 \uc800\ud558 \uc5c6\uc774 \uace0\uc628\uc758 \uacf5\uc815 \ud658\uacbd\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
    • \uc81c\uc5b4 \uac00\ub2a5\ud55c \ud45c\uba74 \uc800\ud56d\ub960<\/strong>: \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1\ub41c \uc800\ud56d\uc73c\ub85c \uc815\uc804\uae30\ub97c \uc81c\uc5b4\ud558\uace0 \uc804\ud558 \ucd95\uc801\uc744 \ubc29\uc9c0\ud558\uc5ec \ubbfc\uac10\ud55c \uc6e8\uc774\ud37c\ub97c \ubcf4\ud638\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n
    • \ub6f0\uc5b4\ub09c \ub0b4\ud654\ud559\uc131<\/strong>: \uac15\uc0b0, \uc54c\uce7c\ub9ac \ubc0f \ubd80\uc2dd\uc131 \uacf5\uc815 \uac00\uc2a4\uc5d0 \ub300\ud55c \ub0b4\uc131\uc774 \ub6f0\uc5b4\ub098 \uc5f4\uc545\ud55c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n

      \uc131\ub2a5 \uac80\uc99d \ud14c\uc2a4\ud2b8<\/strong>
      \u25b2 \uc790\uccb4 \ubc00\ubd09 \ud14c\uc2a4\ud2b8<\/strong>: \uc9c4\uacf5 \uc18c\uc2a4\uac00 \uaebc\uc9c4 \uc0c1\ud0dc\uc5d0\uc11c \uc554\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc74c\uc555\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. 60\ucd08 \uc774\uc0c1 -85kPa ~ -80kPa<\/strong>.
      \u25b2 \uc6e8\uc774\ud37c \ud640\ub529 \ud14c\uc2a4\ud2b8<\/strong>: \uc9c4\uacf5 \uc18c\uc2a4\uac00 \uaebc\uc9c4 \uc0c1\ud0dc\uc5d0\uc11c \ub2e4\uc74c\uacfc \uac19\uc740 \uc74c\uc555\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4. 35\ucd08 \uc774\uc0c1 -80kPa ~ -25kPa<\/strong>\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc548\uc815\uc801\uc778 \uc6e8\uc774\ud37c \ubcf4\uc874\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n

      \uc8fc\uc694 \uc131\ub2a5 \uc0ac\uc591<\/strong><\/p>\n\n\n\n

      \ub9e4\uac1c\ubcc0\uc218<\/th>\ub2e8\uc704<\/th>\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)<\/th>\uc54c\ub8e8\ubbf8\ub284 \uc0b0\ud654\ubb3c(Al\u2082O\u2083)<\/th><\/tr><\/thead>
      \ud45c\uba74 \uc800\ud56d\ub960<\/td>\u03a9<\/td>1 \u00d7 10\u2075<\/td>1 \u00d7 10\u00b9\u2074<\/td><\/tr>
      Max. \uc791\ub3d9 \uc628\ub3c4(\ubd84\ud560 \uc554)<\/td>\u00b0C<\/td>350<\/td>350<\/td><\/tr>
      Max. \uc791\ub3d9 \uc628\ub3c4(\ud1b5\ud569 \uc554)<\/td>\u00b0C<\/td>800<\/td>800<\/td><\/tr>
      \ud761\ucc29 \ud45c\uba74 \uac70\uce60\uae30(Ra)<\/td>\u03bcm<\/td>0.01<\/td>0.01<\/td><\/tr>
      \ud761\ucc29 \ud45c\uba74 \ud3c9\ud0c4\ub3c4<\/td>mm<\/td>0.01<\/td>0.01<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

      \ucc38\uace0: \ubaa8\ub4e0 \uac12\uc740 \ud45c\uc900 \ud074\ub9b0\ub8f8 \ubc0f \ud504\ub85c\uc138\uc2a4 \uc870\uac74\uc5d0\uc11c \uc77c\ubc18\uc801\uc778 \uc131\ub2a5\uc744 \ubc18\uc601\ud569\ub2c8\ub2e4.<\/em><\/p>\n\n\n\n

      <\/p>","protected":false},"excerpt":{"rendered":"

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