{"id":217,"date":"2026-01-22T13:53:15","date_gmt":"2026-01-22T05:53:15","guid":{"rendered":"https:\/\/www.xycmat.com\/?post_type=product&#038;p=217"},"modified":"2026-01-23T17:03:33","modified_gmt":"2026-01-23T09:03:33","slug":"alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic","status":"publish","type":"product","link":"https:\/\/www.xycmat.com\/ko\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/","title":{"rendered":"Alumina Ceramic Microporous Chuck | Semiconductor Wafer &#038; Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic"},"content":{"rendered":"<h1>Product Description<\/h1>\n<div><\/div>\n<div><strong>Alumina Ceramic Microporous Chuck | Semiconductor Wafer &amp; Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic<\/strong><\/div>\n<div><\/div>\n<div>Crafted from high-purity alumina (Al\u2082O\u2083 content \u226599.5%) via precision molding and high-temperature sintering processes, XYC\u2019s alumina ceramic microporous vacuum chucks are engineered as high-performance core components for semiconductor wafer and chip manufacturing, handling, and processing workflows.<\/div>\n<div><\/div>\n<div>Featuring a uniform, interconnected microporous structure, these chucks deliver stable, non-damaging vacuum adsorption\u2014ensuring secure, flat holding of ultra-thin semiconductor wafers, silicon chips, and fragile substrates without causing surface scratches or contamination. Unlike traditional metal or plastic chucks, our porous ceramic vacuum chucks boast exceptional wear resistance (hardness up to HRA 88\u201392, second only to diamond), superior chemical stability, and high-temperature resistance (sustains long-term operation at 1200\u00b0C). They resist corrosion from semiconductor process chemicals, plasmas, and cleaning agents, maintaining consistent porosity and adsorption performance even in harsh production environments.<\/div>\n<div><\/div>\n<div>Precision-machined to meet strict semiconductor industry tolerances, the chuck surface achieves ultra-high flatness (\u22640.005mm) and smoothness (Ra \u22640.2\u03bcm), perfectly matching the dimensional accuracy requirements of wafers and chips of various sizes. The microporous structure is customizable\u2014with adjustable pore size (0.5\u20135\u03bcm) and porosity (20\u201340%)\u2014to adapt to different vacuum pressure demands and substrate materials, ensuring optimal adsorption force and release efficiency.<\/div>\n<div><\/div>\n<div>Our alumina ceramic microporous vacuum chucks are designed to enhance process stability and yield in semiconductor manufacturing steps such as wafer dicing, lithography, etching, and chip packaging. They are non-magnetic, non-conductive, and free of metal ion contamination, making them ideal for high-precision, cleanroom-compatible semiconductor production applications.<\/div>\n<div><\/div>\n<div>Backed by strict quality control throughout the production cycle\u2014from raw material selection to final precision inspection\u2014we offer customizable solutions including tailored sizes, special surface treatments, and porosity optimization to meet the unique requirements of semiconductor equipment manufacturers worldwide.<\/div>\n<div><\/div>\n<h2>\ud575\uc2ec \uc774\uc810<\/h2>\n<div><\/div>\n<ol>\n<li><strong>Uniform Microporous Structure<\/strong>\n<div><\/div>\n<p>Uniform pore distribution ensures balanced vacuum adsorption, preventing wafer warpage or slippage during high-speed processing.<\/li>\n<li><strong>Superior Wear &amp; Corrosion Resistance<\/strong>\n<div><\/div>\n<p>Resists mechanical abrasion and chemical corrosion from semiconductor process fluids, extending service life and reducing maintenance costs.<\/li>\n<li><strong>High-Precision Dimensional Accuracy<\/strong>\n<div><\/div>\n<p>Ultra-flat surface and tight tolerance control guarantee seamless compatibility with semiconductor wafers and chips of various specifications.<\/li>\n<li><strong>Cleanroom Compatibility<\/strong>\n<div><\/div>\n<p>Non-contaminating, non-outgassing material properties meet ISO Class 5 cleanroom standards, avoiding particle pollution in semiconductor manufacturing.<\/li>\n<\/ol>\n<div><\/div>\n<h2>Typical Technical Parameters<\/h2>\n<div><\/div>\n<div>\n<div>\n<table>\n<thead>\n<tr>\n<th>\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th>Specification<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\uc7ac\ub8cc<\/td>\n<td>99.5%+ High-Purity Alumina (Al\u2082O\u2083)<\/td>\n<\/tr>\n<tr>\n<td>Pore Size<\/td>\n<td>0.5\u20135 \u03bcm (customizable)<\/td>\n<\/tr>\n<tr>\n<td>\ub2e4\uacf5\uc131<\/td>\n<td>20\u201340% (adjustable)<\/td>\n<\/tr>\n<tr>\n<td>Surface Flatness<\/td>\n<td>\u22640.005 mm<\/td>\n<\/tr>\n<tr>\n<td>\uacbd\ub3c4<\/td>\n<td>HRA 88\u201392; Mohs Hardness 9.0<\/td>\n<\/tr>\n<tr>\n<td>Max Service Temperature<\/td>\n<td>1200\u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Chemical Stability<\/td>\n<td>Resistant to acids, alkalis, plasmas, and semiconductor process chemicals<\/td>\n<\/tr>\n<tr>\n<td>Customizable Sizes<\/td>\n<td>Diameter: 50\u2013500 mm; Thickness: 10\u201350 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<div><\/div>\n<h2>\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n<div><\/div>\n<ul>\n<li>Semiconductor wafer handling, dicing, lithography, and etching processes<\/li>\n<li>Silicon chip packaging and testing equipment<\/li>\n<li>Flat panel display (FPD) substrate processing<\/li>\n<li>Optical component manufacturing and precision positioning<\/li>\n<\/ul>\n<div><\/div>\n<div>We provide comprehensive pre-sales technical consultation and after-sales support. Contact our team to get customized solutions for your semiconductor production needs.<\/div>\n<div><\/div>","protected":false},"excerpt":{"rendered":"<p>Product Description Alumina Ceramic Microporous Chuck | Semiconductor Wafer &amp; Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic Crafted from high-purity alumina (Al\u2082O\u2083 content \u226599.5%) via precision molding and high-temperature sintering processes, XYC\u2019s alumina ceramic microporous vacuum chucks are engineered as high-performance core components for semiconductor wafer and chip manufacturing, handling, and processing workflows. Featuring [&hellip;]<\/p>","protected":false},"featured_media":218,"comment_status":"open","ping_status":"closed","template":"","meta":[],"product_brand":[],"product_cat":[24,33],"product_tag":[],"class_list":{"0":"post-217","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-alumina-ceramics","7":"product_cat-semiconductor","9":"first","10":"instock","11":"featured","12":"shipping-taxable","13":"product-type-simple"},"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v26.6 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Alumina Ceramic Microporous Chuck | Semiconductor Wafer &amp; Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic - XYC<\/title>\n<meta name=\"description\" content=\"Crafted from high-purity alumina (Al\u2082O\u2083 content \u226599.5%) via precision molding and high-temperature sintering processes, XYC\u2019s alumina ceramic microporous vacuum chucks are engineered as high-performance core components for semiconductor wafer and chip manufacturing, handling, and processing workflows.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.xycmat.com\/ko\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/\",\"url\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/\",\"name\":\"Alumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic - XYC\",\"isPartOf\":{\"@id\":\"https:\/\/www.xycmat.com\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/www.xycmat.com\/wp-content\/uploads\/2026\/01\/bdt1.jpg\",\"datePublished\":\"2026-01-22T05:53:15+00:00\",\"dateModified\":\"2026-01-23T09:03:33+00:00\",\"description\":\"Crafted from high-purity alumina (Al\u2082O\u2083 content \u226599.5%) via precision molding and high-temperature sintering processes, XYC\u2019s alumina ceramic microporous vacuum chucks are engineered as high-performance core components for semiconductor wafer and chip manufacturing, handling, and processing workflows.\",\"breadcrumb\":{\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/#breadcrumb\"},\"inLanguage\":\"ko-KR\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ko-KR\",\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/#primaryimage\",\"url\":\"https:\/\/www.xycmat.com\/wp-content\/uploads\/2026\/01\/bdt1.jpg\",\"contentUrl\":\"https:\/\/www.xycmat.com\/wp-content\/uploads\/2026\/01\/bdt1.jpg\",\"width\":800,\"height\":800},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/www.xycmat.com\/product\/alumina-ceramic-microporous-chuck-semiconductor-wafer-chip-vacuum-chuck-wear-resistant-porous-ceramic\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u9996\u9875\",\"item\":\"https:\/\/www.xycmat.com\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u5546\u5e97\",\"item\":\"https:\/\/www.xycmat.com\/product\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Alumina Ceramic Microporous Chuck | Semiconductor Wafer &#038; 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