Client Cases
We provide a full range of high-performance ceramic materials and custom-processed components to meet the special requirements of different industries for hardness, wear resistance, high temperature resistance, etc.
Semiconductor Equipment Ceramic Robot Arm
Product Features ▲ Self-compactness Test: Turn off the vacuum air source; maintain a negative pressure ranging from -85 Kpa to -80 Kpa for more than 60 seconds. ▲ Wafer Adsorption Test: Turn off the vacuum air source; maintain a negative pressure ranging from -80 Kpa to -25 Kpa for more than 35 seconds. Product Performance […]
Case Overview
Product Features
- High product precision
- Excellent air tightness
- Good high-temperature resistance
- Controllable surface resistivity
- Strong acid-alkali resistance and corrosion resistance, adaptable to extremely harsh environments
▲ Self-compactness Test: Turn off the vacuum air source; maintain a negative pressure ranging from -85 Kpa to -80 Kpa for more than 60 seconds.
▲ Wafer Adsorption Test: Turn off the vacuum air source; maintain a negative pressure ranging from -80 Kpa to -25 Kpa for more than 35 seconds.
| Product Performance Index | Unit | Silicon Carbide | Aluminum Oxide |
|---|---|---|---|
| Resistivity | Ω | 1×10⁵ | 1×10¹⁴ |
| Maximum Operating Temperature (Split-type Arm) | ℃ | 350 | 350 |
| Maximum Operating Temperature (Integrated Arm) | ℃ | 800 | 800 |
| Adsorption Surface Roughness | Ra | 0.01 | 0.01 |
| Adsorption Surface Flatness | mm | 0.01 | 0.01 |
Ready to Start Your Project?
Contact our technical experts to get customized ceramic material solutions
Phone Consultation
+86-769-83939973
Email Contact
mag2@xycarbide.com
Factory Address
No.28, Xiangkou road, Huangnitang District, Changping Town,
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