



Alumina Ceramic Microporous Vacuum Chuck | Semiconductor Wafer & Chip Handling Component | Semiconductor Industry
제품 개요
This high-performance alumina ceramic microporous vacuum chuck is engineered for secure, damage-free handling of semiconductor wafers and chips in ultra-clean manufacturing environments. Its porous ceramic structure delivers uniform vacuum distribution, ensuring stable, flat clamping of thin, fragile wafers without causing deformation or contamination.
As a critical component in semiconductor processing equipment, it improves positioning accuracy and reduces wafer breakage rates, directly enhancing the yield and efficiency of your production lines.
기술 지원 및 서비스
- 재료 선택 기술 상담 및 솔루션 제공
- 최대 ±0.01mm의 정밀도로 고객 요구 사항에 따른 맞춤형 가공
- 제품 검사 보고서 및 자재 인증 제공
제품 상세 사양
Core Technical Advantages
✅ Uniform Vacuum Distribution
Microporous ceramic structure ensures consistent clamping force across the entire wafer surface, minimizing warpage and damage.
✅ High-Purity & Chemical Inertness
Made from 99.7% alumina ceramic, it resists corrosion and particle contamination, meeting the strict cleanliness requirements of semiconductor manufacturing.
✅ Superior Wear Resistance
Outlasts metal chucks by 5–8x, reducing maintenance frequency and replacement costs in high-cycle production.
✅ Ultra-Precision Flatness
Machined to ±0.005mm flatness, ensuring precise wafer alignment and processing accuracy.
Technical Support & Services
✅ Expert Material Selection Consultation
Our engineering team provides tailored guidance to match the right porous ceramic material and chuck specifications to your wafer handling requirements.
✅ Custom Processing Solutions
We offer precision machining of chuck dimensions, pore size, and vacuum channel layouts to meet your exact equipment specifications.
✅ Full Quality Assurance Documentation
Every chuck comes with detailed inspection reports and material certification, ensuring traceability and compliance with SEMI standards.
고급 세라믹
고급 세라믹 제품군은 각기 다른 특성을 지닌 다양한 소재를 포함하며, 각 소재는 특정 애플리케이션 시나리오에 맞게 특별히 설계되었습니다.
세라믹 소재
주요 적용 분야
여러 하이엔드 제조 분야에서 널리 사용되어 고객에게 맞춤형 솔루션을 제공합니다.
관련 제품 추천
다음 제품에도 관심이 있을 수 있습니다.

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Alumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic
Product Description Alumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic Crafted from...
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Ceramic mechanical arm / Semiconductor wafer equipment / Handling arm
Ceramic mechanical arm / Semiconductor wafer equipment / Handling arm Excellent wear resistance, high temperature resistance, corrosion resistance, thermal shock resistance,insulation and other characteristics Good price compared with traditional materials, Having strength and fracture toughness that other materials cannot achieve,suitable for highly corrosive and high-strength environments. Green and environmentally friendly
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왜 동관 XYC 신소재 유한공사 Is Your Premier Partner for Advanced Ceramics & Tungsten Carbides
Founded in 2009, we are a leading manufacturer of advanced ceramics and tungsten carbide. We deliver precision components to 1,000+ global customers in semiconductor, automotive, medical, and energy sectors.
핵심 이점
Diverse Materials & Products
Alumina, Zirconia, Silicon Nitride, Silicon Carbide, Aluminum Nitride, and high-performance tungsten carbide; 10,000+ custom component forms, 8 million+ precision components annual output.
Ultra-High Precision & Durability
±0.001 mm machining accuracy; Ceramics resist 1800°C heat and corrosion; Tungsten steel delivers superior wear resistance.
Tailored Cross-Industry Solutions
End-to-end support from material selection to mass production, available for both small-batch prototyping and large-scale orders.





