Alumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic
Product Overview
Technical Support & Services
- Provide material selection technical consultation and solutions
- Custom processing according to customer requirements with precision up to ±0.01mm
- Provide product inspection reports and material certification
Product Detailed Specifications
Product Description
Core Advantages
- Uniform Microporous Structure
Uniform pore distribution ensures balanced vacuum adsorption, preventing wafer warpage or slippage during high-speed processing.
- Superior Wear & Corrosion Resistance
Resists mechanical abrasion and chemical corrosion from semiconductor process fluids, extending service life and reducing maintenance costs.
- High-Precision Dimensional Accuracy
Ultra-flat surface and tight tolerance control guarantee seamless compatibility with semiconductor wafers and chips of various specifications.
- Cleanroom Compatibility
Non-contaminating, non-outgassing material properties meet ISO Class 5 cleanroom standards, avoiding particle pollution in semiconductor manufacturing.
Typical Technical Parameters
| Parameter | Specification |
|---|---|
| Material | 99.5%+ High-Purity Alumina (Al₂O₃) |
| Pore Size | 0.5–5 μm (customizable) |
| Porosity | 20–40% (adjustable) |
| Surface Flatness | ≤0.005 mm |
| Hardness | HRA 88–92; Mohs Hardness 9.0 |
| Max Service Temperature | 1200°C |
| Chemical Stability | Resistant to acids, alkalis, plasmas, and semiconductor process chemicals |
| Customizable Sizes | Diameter: 50–500 mm; Thickness: 10–50 mm |
Applications
- Semiconductor wafer handling, dicing, lithography, and etching processes
- Silicon chip packaging and testing equipment
- Flat panel display (FPD) substrate processing
- Optical component manufacturing and precision positioning
Advanced Ceramics
The advanced ceramic family encompasses a variety of materials with distinct properties, each of which has been specially designed for specific application scenarios.
Ceramic Materials
Alumina Ceramics (Al₂O₃)
Alumina is the most widely used advanced ceramic material, offering excellent electrical insulation, high hardness, and good wear resistance. It can operate at temperatures up to 1700°C, making it suitable for a wide range of industrial applications.
Main Application Fields
Widely used in multiple high-end manufacturing fields to provide customized solutions for customers
Ceramic Roller-ceramic Dual-roll-ceramic Three-roll
Precision RollsCeramic Roller-ceramic Dual-roll-ceramic Three-roll 1. Product OverviewTungsten ca...
View Related Cases
Ceramic pump and valve plunger
Ceramic Valve Plungers and Valve Bodies Ceramic valve plungers and valve bodies are essential...
View Related Cases
porous suction cup Semiconductor Equipment – Ceramic Vacuum Chuck
Semiconductor Equipment – Ceramic Vacuum Chuck Ceramic vacuum chucks are a special type of vacuum...
View Related CasesRelated Products Recommendation
You may also be interested in the following products
Silicon Nitride Ceramic Heating Plate | Ceramic Components for Molding Presses
Silicon nitride (Si₃N₄) ceramic heating plates are high-performance structural ceramic components specifically engineered for demanding applications in hot pressing and molding equipment—such as those used in powder metallurgy, technical ceramics, and composite material manufacturing. Leveraging the exceptional properties of silicon nitride, these heating plates deliver outstanding mechanical strength, thermal stability, and electrical insulation even under extreme operating conditions, making them a superior alternative to conventional metal or alumina-based heating elements.
View DetailsAlumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic
Product Description Alumina Ceramic Microporous Chuck | Semiconductor Wafer & Chip | Vacuum Chuck | Wear-Resistant Porous Ceramic Crafted from…
View Details
Ceramic mechanical arm / Semiconductor wafer equipment / Handling arm
Ceramic mechanical arm / Semiconductor wafer equipment / Handling arm Excellent wear resistance, high temperature resistance, corrosion resistance, thermal shock resistance,insulation and other characteristics Good price compared with traditional materials, Having strength and fracture toughness that other materials cannot achieve,suitable for highly corrosive and high-strength environments. Green and environmentally friendly
View Details
Ceramic Pump and Valve Plunger
Made of toughened structural ceramic materials, high mechanical strength, long service life With wear resistance, corrosion resistance, high temperature stability,chemical…
View DetailsSend an Inquiry
Contact Us
Why Dongguan XYC New Material Co., Ltd. Is Your Top Choice for Advanced Ceramics
Founded in 2002, Dongguan XYC New Material Co., Ltd. specializes in R&D and production of advanced ceramics and cemented carbides. We have provided precision components (Alumina ceramics（Al₂O₃）、Zirconia ceramics（ZrO₂）、Magnesium-zirconium oxide ceramics (MgO-ZrO₂)、Silicon nitride ceramics(Si₃N₄)、Silicon carbide ceramics（SiC）、Aluminum nitride ceramics（AlN）) to over 2000+ enterprises worldwide, serving industries including semiconductor, automotive, medical, and energy. Here are our core advantages:
Diverse Materials & Full Product Range
We cover a full range of advanced ceramic materials including Alumina (Al₂O₃), Zirconia (ZrO₂), Silicon Nitride (Si₃N₄), and Silicon Carbide (SiC). We can customize over 10,000+ component forms (tubes, rods, plates, valves, plungers, etc.) to meet material performance requirements across different industries.
High Precision & Extreme Environment Resistance
With precision forming and sintering processes, we achieve ±0.001mm micro-level machining accuracy. Our ceramic components feature high hardness, high temperature resistance (1800°C), strong corrosion resistance, and low friction, making them suitable for extreme working conditions like semiconductor manufacturing and automotive welding.
Cross-Industry Solutions & Customization
We deeply serve industries like semiconductor, automotive, medical, and energy, providing integrated technical solutions from material selection to finished product delivery. We support rapid prototyping for small batches and stable mass production for large orders, meeting customization needs of clients of all scales.
English 
German 
Korean 
