Semiconductor Equipment – Ceramic Vacuum Chuck
Ceramic vacuum chucks are a special type of vacuum pad made from porous ceramic materials, featuring high porosity, high strength, and excellent surface flatness. They are widely used in semiconductor wafer processes such as slicing, grinding, polishing, and inspection.
Product Features
- High precision
- Excellent air tightness
- Uniform suction force
- Wear-resistant and corrosion-resistant
▲ Surface flatness can reach 0.002 mm; parallelism can reach 0.003 mm
表格
| Material | Pore Size (μm) | Porosity | Pressure Differential (bar) | Resistivity | Color |
|---|---|---|---|---|---|
| Aluminum Oxide | 5–50 | 15–45% | 35 | 1×10¹¹ Ω·cm | Dark gray / Earth yellow |
| Silicon Carbide | 10–50 | 15–45% | 30 | 1×10⁸ Ω·cm | Black |
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