Client Cases
We provide a full range of high-performance ceramic materials and custom-processed components to meet the special requirements of different industries for hardness, wear resistance, high temperature resistance, etc.
porous suction cup Semiconductor Equipment – Ceramic Vacuum Chuck
Semiconductor Equipment – Ceramic Vacuum Chuck Ceramic vacuum chucks are a special type of vacuum pad made from porous ceramic materials, featuring high porosity, high strength, and excellent surface flatness. They are widely used in semiconductor wafer processes such as slicing, grinding, polishing, and inspection. Product Features ▲ Surface flatness can reach 0.002 mm; parallelism […]
Case Overview
Semiconductor Equipment – Ceramic Vacuum Chuck
Ceramic vacuum chucks are a special type of vacuum pad made from porous ceramic materials, featuring high porosity, high strength, and excellent surface flatness. They are widely used in semiconductor wafer processes such as slicing, grinding, polishing, and inspection.
Product Features
- High precision
- Excellent air tightness
- Uniform suction force
- Wear-resistant and corrosion-resistant
▲ Surface flatness can reach 0.002 mm; parallelism can reach 0.003 mm
表格
| Material | Pore Size (μm) | Porosity | Pressure Differential (bar) | Resistivity | Color |
|---|---|---|---|---|---|
| Aluminum Oxide | 5–50 | 15–45% | 35 | 1×10¹¹ Ω·cm | Dark gray / Earth yellow |
| Silicon Carbide | 10–50 | 15–45% | 30 | 1×10⁸ Ω·cm | Black |
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wafer handling finger
Product Features – Ceramic Robotic Arms for Semiconductor Equipment wafer handling finger Ceramic mechanical arms, also known as ceramic robotic fingers, wafer carriers, or ceramic handling arms, are primarily used in semiconductor equipment for transporting and transferring wafers. They function as the “hands” of semiconductor equipment robots, responsible for precisely moving circular silicon wafers to […]
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